Friday, December 7, 2012

1212.1258 (H. Maury et al.)

Analysis of periodic Mo/Si multilayers: influence of the Mo thickness    [PDF]

H. Maury, Jean-Michel André, Karine Le Guen, N. Mahne, Angela Giglia, S. Nannarone, Françoise Bridou, Franck Delmotte, Philippe Jonnard
A set of Mo/Si periodic multilayers is studied by non destructive analysis methods. The thickness of the Si layers is 5 nm while the thickness of the Mo layers changes from one multilayer to another, from 2 to 4 nm. This enables us to probe the effect of the transition between the amorphous to crystalline state of the Mo layers near the interfaces with Si on the optical performances of the multilayers. This transition results in the variation of the refractive index (density variation) of the Mo layers, as observed by x-ray reflectivity (XRR) at a wavelength of 0.154 nm. Combining x-ray emission spectroscopy and XRR, the parameters (composition, thickness and roughness) of the interfacial layers formed by the interaction between the Mo and Si layers are determined. However, these parameters do not evolve significantly as a function of the Mo thickness. It is observed by diffuse scattering at 1.33 nm that the lateral correlation length of the roughness strongly decreases when the Mo thickness goes from 2 to 3 nm. This is due to the development of Mo crystallites parallel to the multilayer surface.
View original:

No comments:

Post a Comment