P. Ovartchaiyapong, L. M. A. Pascal, B. A. Myers, P. Lauria, A. C. Bleszynski Jayich
Single-crystal diamond is a promising material for MEMs devices because of its low mechanical loss, compatibility with extreme environments, and built-in interface to high-quality spin centers. But its use has largely been limited by challenges in processing and growth. We demonstrate a wafer bonding-based technique to form diamond on insulator, from which we make single-crystal diamond micromechanical resonators with mechanical quality factors as high as 338,000 at room temperature. Variable temperature measurements down to 10 K reveal a nonmonotonic dependence of quality factor on temperature. These resonators enable integration of single-crystal diamond into MEMs technology for classical and quantum applications.
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http://arxiv.org/abs/1206.4363
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