Jason D. Jones, Rakesh K. Shah, Guido F. Verbeck, Jose M. Perez
The removal of single atomic layers from multi-layer graphene using a He
plasma is reported. By applying sample biases of -60 and +60 V during He plasma
exposure, layer removal is found to be due to electrons instead of He ions or
neutrals in the plasma. The rate of layer removal depends on exposure time,
sample bias and pre-annealing treatments. Optical contrast microscopy and
atomic force microscopy studies show that the removal of C atoms occurs
approximately one layer at a time across the entire multi-layer sample with no
observable production of large pits or reduction in lateral dimensions. Layer
removal is proposed to arise from the electron-stimulated dissociation of C
atoms from the basal plane. This process differs from plasma techniques that
use reactive species to etch multi-layer graphene.
View original:
http://arxiv.org/abs/1202.3464
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